In the field of chip manufacturing, the slightest trace of impurities or micro-level oxygen corrosion can lead to the failure of an entire chip. High-purity nitrogen, as an “invisible guardian” of chip manufacturing, is the key to ensuring chip yield and performance. With years of dedication to nitrogen generation technology, Minnuo Group provides stable and high-purity nitrogen supply for the entire chip manufacturing process with its advanced membrane and PSA nitrogen generation equipment, becoming a trusted choice for numerous semiconductor enterprises.
The “Nitrogen Imperative” in Chip Manufacturing: High Purity and Stability Are Indispensable
Every step of chip manufacturing, from silicon wafer processing to packaging and testing, has stringent environmental requirements. In the lithography process, photoresist is extremely sensitive to oxygen; contact with oxygen will cause pattern distortion and directly affect chip resolution, requiring nitrogen with a purity of ≥99.999% to completely replace the air inside the equipment. In etching and chemical vapor deposition (CVD) processes, nitrogen not only protects silicon wafers from oxidation but also acts as an auxiliary gas to adjust etching rates and a carrier gas to ensure uniform deposition of thin films. During the packaging and testing phase, metal wires such as aluminum and copper are prone to oxidation, and the inert environment created by nitrogen can greatly reduce the oxidation defect rate and improve solder joint strength.
Furthermore, chip manufacturing has extremely high requirements for the stability of nitrogen supply. Even minor fluctuations in purity may affect the production process and product quality. Deeply understanding industry needs, Minnuo Group takes technological innovation as the core and creates nitrogen generation solutions adapted to all scenarios of chip manufacturing.
Minnuo Nitrogen Generators: Dual Technology Routes for Precise Matching of Chip Manufacturing Needs
Membrane Nitrogen Generators: Efficiently Adapted to Medium and Low Purity Scenarios
Minnuo membrane nitrogen generators adopt world-leading hollow fiber membrane separation technology. By passing clean and dry compressed air through the semipermeable membrane, “fast gases” such as oxygen and water vapor permeate and discharge rapidly, and nitrogen is enriched in the membrane before output. The equipment can achieve a nitrogen purity of 90%-99.9% with a flow range of 5～5000Nm³/h (20℃, 101.325kPa). The normal pressure dew point is ≤-40℃ and customizable, which can meet the nitrogen demand of some auxiliary links in chip manufacturing, such as moisture and oxidation prevention for electronic component storage and inert environment creation for some cleaning processes.
The equipment is a compact integrated unit with low maintenance requirements and no operating costs, as well as a lower initial investment. It is also equipped with internationally renowned brand air compressors and multi-stage air treatment systems to ensure the cleanliness of the input air (particles ＜0.01μm, oil ＜0.01ppm), guarantee the stable operation of membrane modules, and adapt to the scenarios of decentralized workstations and flexible nitrogen supply in chip manufacturing workshops.
PSA Nitrogen Generators: Ultra-High Purity Supply to Overcome Core Process Challenges
Addressing the demand for ultra-high purity nitrogen in core processes of chip manufacturing such as lithography, etching and packaging, Minnuo PSA nitrogen generators use high-quality imported carbon molecular sieves (CMS) as adsorbents and adopt a dual adsorption tower parallel design. Through PLC intelligent control, they realize the alternate operation of pressure adsorption and decompression regeneration, and can stably output nitrogen with a purity of 95%-99.9997%. Some models can even meet the PPB-level (parts per billion) nitrogen standard required for semiconductor wafer manufacturing.
The equipment features fast gas production, capable of producing qualified nitrogen in 10-15 minutes, with a dew point as low as ≤-70℃ and a nitrogen pressure range of 0.5-0.8Mpa (higher pressure can be achieved with a supercharger). It can accurately meet the requirements of oxygen-free environment in the lithography process and oxidation prevention of metal wires in the packaging stage. Meanwhile, equipped with German imported flowmeters, pneumatic valves and other core components, combined with an intelligent pressure control system, it controls the nitrogen purity fluctuation within ±0.001%, providing “zero fluctuation” nitrogen guarantee for the core processes of chip manufacturing.
Case Testimony: Minnuo Nitrogen Generators Improve Quality and Efficiency in Chip Manufacturing
A large domestic chip manufacturing enterprise once faced problems of high oxidation failure rate of gold wire bonding and excessive packaging bubble rate in the packaging process, making it difficult to improve product yield. After introducing Minnuo PSA nitrogen generators, the 99.999% high-purity nitrogen output by the equipment quickly replaced the air in the packaging workshop and created a stable inert environment.
In the end, the enterprise saw an 80% reduction in gold wire bonding oxidation failure cases, a 15% increase in welding strength, the packaging bubble rate dropped from 0.5% to 0.02%, and the product yield rose to 99.8%, significantly improving production efficiency. In addition, due to the “on-demand gas production” mode of Minnuo nitrogen generators, there is no need to rely on nitrogen cylinders or bulk storage tanks. Compared with traditional nitrogen supply methods, it saves enterprises 50%-300% of costs and avoids supply risks caused by logistics and transportation.
Choose Minnuo: Three Core Advantages to Empower the Upgrading of Chip Manufacturing
Safe and Reliable, in Line with Industry Standards
The entire Minnuo nitrogen generator system operates at room temperature without the use of hazardous cryogenic liquids, greatly improving safety compared with high-pressure nitrogen cylinders. The equipment has passed the ISO-9001 quality system certification. Core components such as carbon molecular sieves provide a 10-year warranty, and major valve equipment offers a 20-year warranty, ensuring long-term stable operation and meeting the stringent reliability requirements of the semiconductor industry for equipment.
Energy-Saving and Efficient, Reducing Production Costs
The equipment is equipped with an intelligent energy-saving system that automatically enters standby mode when nitrogen is not needed, and real-time monitors pressure levels to match nitrogen demand, avoiding energy waste and reducing energy consumption by 20% compared with traditional nitrogen generation equipment. In addition, the “on-site nitrogen generation” mode eliminates the links of nitrogen transportation and storage, reduces intermediate losses, and can significantly reduce the operating costs of enterprises in long-term use.
Customized Services for Diverse Scenarios
Minnuo has more than 50 standard nitrogen generator models and can provide customized solutions according to the specific production capacity and process requirements of chip manufacturing enterprises (such as nitrogen purity, pressure and flow requirements of different links). Whether it is centralized nitrogen supply in lithography workshops or decentralized nitrogen supply in packaging workstations, it can be accurately adapted to help enterprises optimize production processes.
Conclusion
With the acceleration of chip localization in China, Minnuo Group has always taken “precise nitrogen supply, stability and reliability” as the core. Relying on advanced nitrogen generation technology and high-quality services, it has built a solid quality defense line for chip manufacturing enterprises. In the future, Minnuo will continue to deepen technological innovation in nitrogen generation, continuously upgrade product performance, provide more efficient and stable nitrogen solutions for China’s chip manufacturing, grow together with the semiconductor industry, and help China’s chip industry step into a new stage of high-quality development.
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